SURFCOM CREST

World highest standard. Flagship model of Tokyo Seimitsu Surfcom. The new linear motor drive unit was installed, and the degree of completion as a mother machine was extremely high.

【Surfcom CREST Features】
■ Newly developed high stability light path type laser interference sensor mounted
High stability laser light interferometric sensor equipped with TOKYO SEIMITS 'optical fiber laser interference measurement system is installed. Resolution 0.31 nm.
Dynamic range and resolution ratio is 42,000,000: 1.
It is an epoch-making sensor that can evaluate a wide range of contour shape and fine surface shape hidden in its shape with one trace.

■ Patented linear motor mounted in drive section
Adopt linear motor drive to reduce vibration of the drive section. High precision, high speed movement has been realized.

■Simultaneous analysis of roughness and contour by one measurement
It is possible to improve measurement efficiency while maintaining high accuracy.

■ Speed ​​up measuring section (200 mm / s)
A wide measurement range of 200 mm in the horizontal direction and 13 mm in the vertical direction.
Automatic control of ± 45 ° is possible with a drive tilt unit (SURFCOM CREST-T type)