Non-contact Three-dimensional Surface Roughness / Shape Measuring Machine Opt-scope (White Interference Microscope)

Three-dimensional roughness of sliding surface (high polished surface) of bearings. It supports various applications such as analysis of scratches and wear, shape evaluation of cutting edges of abrasive wheels and carbide chips, and surface defect detection of semiconductor wafers. Measurement of high polished surface, MEMS fine shape measurement, measurement of machined parts such as automotive parts, etc. are widely available.

【Features of Opt-scope (Optoscope)】
■ Non-contact, wide range, high resolution
It has high resolution of 0.1 nm, and it can be applied in a wide range from analysis of narrow range fine roughness to analysis of wide range of undulation shape.

■ 3D measurement and evaluation (conforming to ISO 25178-2) on the surface properties of machined surfaces in a non-contact manner
By our proprietary method, it is possible to acquire more clearly the shape data of the machined surface which the existing white interference microscope is not good at. The width of the object to be measured expanded widely.

■ Revolving mechanism that can mount up to 5 lenses
Various lenses can be easily switched with a revolver. Optimum measurement suitable for work and purpose is possible. (R model)

■ Electric XY stage and stitching function allow measurement in a larger range
Automatic measurement of multiple faces in arbitrary places, using electric stage, in any order. Furthermore, by combining the surfaces with the stitching function, it is possible to perform a wide range of measurement and analysis that can not fit in the field of view of the interference lens.