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1. The only nanoindentation tester with a temperature control mechanism
※It reduces sample and tester thermal expansion to improve data reproducibility.
2. equipped with a high-precision positioning stage that adopts the high-precision stage technology for electron-beam lithography equipment developed in-house
※Positioning hardness tests with 0.1µm steps are possible.
3. anti-vibration mechanism
※equipped with a wedge-shaped stage and an active anti-vibration table、resistant to vibration and enhances data reproducibility.