PRODUCTS

Conveyance system for semiconductors

In semiconductor manufacturing, where cleanliness and recoil stability are required, this conveyance system is responsible for transferring wafers between each manufacturing equipment. In clean rooms where semiconductors are manufactured, dust-free operation is an absolute requirement, and automation of transfer and storage is essential to minimize human movement, which is the largest source of dust. Automation of the transfer process is also expected to save labor and manpower.

Transfer robot / TAZMO

Tazmo's clean transfer robots are highly regarded in Japan and abroad for their unique technology. Highly trusted for its high speed and cleanliness. We can make proposals compatible for package batch manufacturing PLP, free-access, etc., including reasonable prices according to the application.

Pre-aligner / TAZMO

Non-contact orientation flat alignment and centering equipment that is compatible with compound semiconductors and glass. Automatic recognition of wafer size and type of notch/orientation flat eliminates the need for settings from a host controller. The compact design with built-in controller is another feature of this system.